Micro-Electronics Evaporation Sources

Micro-Electronic Filaments

Tungsten filaments in a variety of shapes and numbers of wires.

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Tungsten basket heaters in varying shapes. Load material directly in basket.

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Micro-Electronic Basket Crucible Heaters

Tungsten basket crucible heaters are used with a matching crucible.

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Micro-Electronic Shielded Crucible Heaters

Shielded crucible heaters are used with a matching crucible to provide uniform heating.

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Micro-Electronic Crucibles

Crucibles to be used in the basket or shielded crucible heaters. Available in a variety of materials.

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Micro-Electronic Boat Heaters

Boat heaters available in a variety of styles and materials.

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Alumina Coated Micro-Electronic Sources

Alumina coating on boat heaters provides a barrier layer between the evaporant and refractory boat material. Ideal for materials that react with the refractory metals.

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Micro-Electronic Box Sources

Tantalum Box heaters can be used for high vapor pressure materials that tend to spit during evaporation.