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Ruthenium Sputtering Target

MetalsTek Engineering is a trusted manufacturer and supplier of Ruthenium Sputtering Targets. We can custom targets according to your requests with short lead times and competitive prices.

Ruthenium Sputtering Target

Ruthenium Sputtering Target

Material: Ruthenium

Purity: Ru 99.9%

Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

Size Ranges: Disc – Dia. ≤14” * Thick≥1mm; Block – Thick≥1mm * Width ≤12” * Length≤32”

Bonding: Indium, Copper or Elastomer Bonding Recommended

Main Applications: Electronics, Semiconductors, Flat Panel Displays

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Description

Ruthenium Sputtering Targets are essential for advanced technologies, including optics, semiconductors, and magnetic storage media. These targets are made with high purity levels, typically 99.9%, to ensure optimal performance in sputtering processes. Ruthenium is a material of great interest for next-generation semiconductors like MRAM (Magnetoresistive Random Access Memory), highlighting its importance in cutting-edge technology applications. Ruthenium sputtering targets play a crucial role in deposition processes, ensuring the creation of precise and high-quality thin films essential for various industrial applications.

Manufacturing Process

Manufacturing Process

Refining: Three-layer electrolytic process

Melting and casting: Electrical resistance furnace – Semi-continuous casting

Grain refinement: Thermomechanical treatment

Cleaning and final packaging: Cleaned for use in vacuum; Protection from environmental contaminants; Protection during shipment

Applications

  1. Electronics and Semiconductor Devices: Ruthenium, due to its excellent electrical properties, is used in the manufacture of advanced electronic components, including capacitors and resistors. It also serves as a barrier layer in copper interconnects, improving the performance of semiconductor devices.
  2. Data Storage Technologies: In data storage, Ruthenium is a crucial material for producing thin magnetic layers in hard disk drives (HDDs). Its ability to enhance the magnetic properties of recording layers significantly increases data storage density and device reliability.
  3. Catalysis and Electrochemical Applications: Ruthenium’s catalytic properties find applications in electrochemical devices, including fuel cells and supercapacitors. Ruthenium-based catalysts facilitate chemical reactions, improving the efficiency and performance of these devices.
  4. Optical and Decorative Coatings: Ruthenium coatings’ reflective properties are exploited in optical devices and for decorative purposes, where durability and resistance to tarnish are required.

Packaging

Our Ruthenium Sputtering Targets are vacuum sealed and been clearly labeled externally to ensure efficient identification and quality control. To prevent any damage during storage or transportation, we take great care.

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Attach a Drawing
*e-mail address with your company's domain name is preferred. 

Request A Quote
Attach a Drawing
*e-mail address with your company's domain name is preferred.