Alumina Coated Micro-Electronic Sources

Alumina-coated evaporation sources are designed as alternatives to alumina crucibles for specific applications, offering excellent heat transfer and compatibility with most metals. These sources prevent the evaporator from adhering to the alumina, maintaining stable resistance when the material melts into a spherical point source, which extends lifespan. Coated sources require 30 to 50 percent more power due to reduced heat conduction. The alumina, applied using plasma spray, is of semiconductor grade. To prevent overheating, avoiding temperatures above 1850°C and reducing power during evaporation is crucial.

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Boats

Narrowed Trough

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#082: Molybdenum

Dimple

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#083: Molybdenum

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#084: Molybdenum

Inverted Top-Hat Trough

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#085: Molybdenum

Heaters Covers

Box Heater

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#085: Alumina-Coated Tantalum

Cover for Box Heater #085

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#086: Alumina-Coated Tantalum

Box Heater

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#087: Alumina-Coated Tantalum

Cover for Box Heater #087

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#088: Alumina-Coated Tantalum

Box Heater

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#089: Alumina-Coated Tantalum

Cover for Box Heater #089

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#090: Alumina-Coated Tantalum

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