The copper backing plates are machined from oxygen-free, high-conductivity copper (OFHC Copper).
For regular, circular disc-type sputtering sources – TORUS® 2, 3, and 4 accept a 0.092″ thick backing plate, found in the list below.
Most sputter sources accept a 0.125″ (1/8″) thick target bonded to a 0.125″ thick backing plate.
For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250″ (1/4″) to suit most applications.
NOTE:
Those identified in the chart by diameter and thickness are plain discs without through or tapped holes.
MetalsTek can machine the copper backing plates according to requests.
They are suitable for most target sources, circular or rectangular, from other manufacturers, although they may need minor machining for screws, clamps, etc.
Copper Cup Backing Plates are available upon request.
