OFHC Copper Backing Plates

copper-target-bonding-metalstek
  1. The copper backing plates are machined from oxygen-free, high-conductivity copper (OFHC Copper).
  2. For regular, circular disc-type sputtering sources – TORUS® 2, 3, and 4 accept a 0.092″ thick backing plate, found in the list below.
  3. Most sputter sources accept a 0.125″ (1/8″) thick target bonded to a 0.125″ thick backing plate.
  4. For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250″ (1/4″) to suit most applications. 

NOTE:

  • Those identified in the chart by diameter and thickness are plain discs without through or tapped holes.
  • MetalsTek can machine the copper backing plates according to requests. 
  • They are suitable for most target sources, circular or rectangular, from other manufacturers, although they may need minor machining for screws, clamps, etc.
  • Copper Cup Backing Plates are available upon request.

Copper Backing Plate List

ShapeBacking Plate SizePart No.Latest Price
Circular1.0″ x 0.0625″TBPCU01A1
1.0″ x 0.125″TBPCU01A2
1.3″ x 0.125″ (With Magnetic Keeper)TBPCU01.3K+
2.0″ x 0.0625″TBPCU02A1
2.0″ x 0.125″TBPCU02A2
2.0″ x 0.125″ (With Magnetic Keeper)TBPCU02K2
2.00″ x 0.092″ (For Torus 2)TBPCU02T2
3.0″ x 0.0625″TBPCU03A1
3.0″ x 0.125″TBPCU03A2
3.0″ x 0.125″ (With Magnetic Keeper)TBPCU03K2
3.00″ x 0.092″ (For Torus 3)TBPCU03T2
4.0″ x 0.0625″TBPCU04A1
4.0″ x 0.125″TBPCU04A2
4.00″ x 0.092″ (For Torus 4)TBPCU04T2
5.0″ x 0.0625″TBPCU05A1
5.0″ x 0.125″TBPCU05A2
6.0″ x 0.0625″TBPCU06A1
6.0″ x 0.125″TBPCU06A2
6.0″ x 0.125″ (With Magnetic Keeper)TBPCU06K2
6.0″ x 0.250″TBPCU06A4
7.0″ x 0.125″TBPCU07A2
7.0″ x 0.250″TBPCU07A4
8.0″ x 0.125″TBPCU08A2
8.0″ x 0.250″TBPCU08A4
TORUS 10 Full (6.375″ x 0.50″)TBPT10FULL
RectangularTailored SizeTBPCUREC
CupTailored SizeTBPCUCUP
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