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Rechargeable Baffled Boxes

Overview

Excellent thermal sources for depositing thin film of silicon monoxide.

How they work

  • The box is loaded with SiO before use (not exceeding the weight indicated for that box)
  • Bulk SiO is held in compartment(s) indirectly connected to the chimney
  • As the box is heated, the SiO vapor is forced to flow through a series of baffles before exiting at the chimney
  • Since there is no line of sight between the bulk material and the substrate surface, the deleterious effects of spitting or streaming on the depositing film are eliminate

Additional information

  • Available in non-rechargeable and rechargeable—named to reflect the location of the initial charging or recharging
  • A rechargeable box can be filled through one or two lids while still mounted on its electrical feedthroughs in the vacuum chamber
  • A non-rechargeable box must be dismounted from its electrical feedthroughs and disassembled before charging or re-charging
  • Both styles offer long life and can be recharged many times
  • Designed with two evaporation plume directions—upward “vertical” or downward “inverted” (by turning either source on its side, a “horizontal” plume can be arranged)

Rechargeable Baffled Boxes

Rechargeable Baffled Boxes

2 Loading Caps
so-10-std

#578: 1.4Volt, 257 Amps, 360 Watts

#579: 1.4Volt, 256 Amps, 358 Watts

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Rechargeable Baffled Boxes

1 Loading Cap
so-20-std

#580: 0.86Volt, 333 Amps, 286 Watts

#581: 0.91Volt, 328 Amps, 298 Watts

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Rechargeable Baffled Boxes

1 Loading Cap
so-22-std

#582: 1.34Volt, 246 Amps, 330 Watts

#583: 1.31Volt, 236 Amps, 309 Watts

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Rechargeable Baffled Boxes

2 Loading Caps
so-24-std

#584: 1.67Volt, 264 Amps, 441 Watts

#585: 1.58Volt, 272 Amps, 430 Watts

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Rechargeable Baffled Boxes

Side (Horizontal) with 2 Loading Caps
so-26-std

#586: 1.62Volt, 271 Amps, 439 Watts

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